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Influence of the applied field frequency (27–2450 MHz) in high‐frequency sustained plasmas used to etch polyimide
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9.This is the case not only with surface wave plasmas but with all HF‐produced plasmas when pressure is low enough so that (ν is the electron‐neutral collision frequency for the momentum transfer and ω is the wave angular frequency). This is because the minimum electron plasma angular frequency at which the plasma can be sustained is given by where the exact value of A depends on the type of plasma, but is always of the order of unity.
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