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Dielectric properties of silicon oxynitride films
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10.1063/1.100779
/content/aip/journal/apl/54/10/10.1063/1.100779
http://aip.metastore.ingenta.com/content/aip/journal/apl/54/10/10.1063/1.100779
/content/aip/journal/apl/54/10/10.1063/1.100779
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/content/aip/journal/apl/54/10/10.1063/1.100779
1989-03-06
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dielectric properties of silicon oxynitride films
http://aip.metastore.ingenta.com/content/aip/journal/apl/54/10/10.1063/1.100779
10.1063/1.100779
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