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Formation of an interfacial AlN layer in an Al/Si3N4 thin‐film system
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10.1063/1.101418
/content/aip/journal/apl/54/10/10.1063/1.101418
http://aip.metastore.ingenta.com/content/aip/journal/apl/54/10/10.1063/1.101418
/content/aip/journal/apl/54/10/10.1063/1.101418
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/content/aip/journal/apl/54/10/10.1063/1.101418
1989-03-06
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Formation of an interfacial AlN layer in an Al/Si3N4 thin‐film system
http://aip.metastore.ingenta.com/content/aip/journal/apl/54/10/10.1063/1.101418
10.1063/1.101418
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