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Study of planarization of cobalt silicide lines and silicon surfaces by scanning force microscopy and scanning electron microscopy
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10.1063/1.101386
/content/aip/journal/apl/54/16/10.1063/1.101386
http://aip.metastore.ingenta.com/content/aip/journal/apl/54/16/10.1063/1.101386
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/content/aip/journal/apl/54/16/10.1063/1.101386
1989-04-17
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Study of planarization of cobalt silicide lines and silicon surfaces by scanning force microscopy and scanning electron microscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/54/16/10.1063/1.101386
10.1063/1.101386
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