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Anisotropic laser etching of oxidized (100) silicon
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10.1063/1.101443
/content/aip/journal/apl/54/3/10.1063/1.101443
http://aip.metastore.ingenta.com/content/aip/journal/apl/54/3/10.1063/1.101443
/content/aip/journal/apl/54/3/10.1063/1.101443
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/content/aip/journal/apl/54/3/10.1063/1.101443
1989-01-16
2014-08-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Anisotropic laser etching of oxidized (100) silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/54/3/10.1063/1.101443
10.1063/1.101443
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