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Chemical vapor deposition of single‐crystal films of cubic SiC on patterned Si substrates
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10.1063/1.102252
/content/aip/journal/apl/55/15/10.1063/1.102252
http://aip.metastore.ingenta.com/content/aip/journal/apl/55/15/10.1063/1.102252
/content/aip/journal/apl/55/15/10.1063/1.102252
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/content/aip/journal/apl/55/15/10.1063/1.102252
1989-10-09
2014-07-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Chemical vapor deposition of single‐crystal films of cubic SiC on patterned Si substrates
http://aip.metastore.ingenta.com/content/aip/journal/apl/55/15/10.1063/1.102252
10.1063/1.102252
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