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Interface study of hydrogenated amorphous silicon nitride on hydrogenated amorphous silicon by x‐ray photoelectron spectroscopy
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10.1063/1.102299
/content/aip/journal/apl/55/25/10.1063/1.102299
http://aip.metastore.ingenta.com/content/aip/journal/apl/55/25/10.1063/1.102299
/content/aip/journal/apl/55/25/10.1063/1.102299
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/content/aip/journal/apl/55/25/10.1063/1.102299
1989-12-18
2014-11-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Interface study of hydrogenated amorphous silicon nitride on hydrogenated amorphous silicon by x‐ray photoelectron spectroscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/55/25/10.1063/1.102299
10.1063/1.102299
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