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Quantum device microfabrication: Resolution limits of ion beam patterning
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10.1063/1.101876
/content/aip/journal/apl/55/4/10.1063/1.101876
http://aip.metastore.ingenta.com/content/aip/journal/apl/55/4/10.1063/1.101876
/content/aip/journal/apl/55/4/10.1063/1.101876
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/content/aip/journal/apl/55/4/10.1063/1.101876
1989-07-24
2014-09-17
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Scitation: Quantum device microfabrication: Resolution limits of ion beam patterning
http://aip.metastore.ingenta.com/content/aip/journal/apl/55/4/10.1063/1.101876
10.1063/1.101876
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