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Ultrashallow, high doping of boron using molecular layer doping
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10.1063/1.103180
/content/aip/journal/apl/56/14/10.1063/1.103180
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/14/10.1063/1.103180
/content/aip/journal/apl/56/14/10.1063/1.103180
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/content/aip/journal/apl/56/14/10.1063/1.103180
1990-04-02
2014-12-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ultrashallow, high doping of boron using molecular layer doping
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/14/10.1063/1.103180
10.1063/1.103180
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