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Real time i n s i t u observation of the film growth of hydrogenated amorphous silicon by infrared reflection absorption spectroscopy
1.Y. Toyoshima, K. Kumata, U. Itoh, K. Arai, A. Matsuda, N. Washida, G. Inoue, and K. Katsuumi, Appl. Phys. Lett. 46, 584 (1985).
2.K. Kumata, U. Itoh, Y. Toyoshima, N. Tanaka, H. Anzai, and A. Matsuda, Appl. Phys. Lett. 48, 1380 (1986).
3.Y. Toyoshima, K. Kumata, U. Itoh, and A. Matsuda, Appl. Phys. Lett. 51, 1925 (1987).
4.Y. Toyoshima, K. Arai, and A. Matsuda, 13th International Conference on Amorphous and Liquid Semiconductors, 22 pm F08, Asheville, August 1989.
5.U. Itoh, Y. Toyoshima, H. Onuki, N. Washida, and T. Ibuki, J. Chem. Phys. 85, 4867 (1986).
6.T. Ibuki, N. Washida, U. Itoh, Y. Toyoshima, and H. Onuki, Chem. Phys. Lett. 136, 447 (1987).
7.A. Matsuda and N. Hata, in Glow‐Discharge Hydrogenated Amorphous Silicon, edited by K. Tanaka (KTK/Kluwer, Tokyo/Boston, 1989), Chap. 2.
8.R. W. Collins, in Amorphous Silicon and Related Materials, edited by H. Fritsche (World Scientific, Singapore, 1988), Vol. B, pp. 1003–1044.
9.A. M. Antoine and B. Drevillon, J. Appl. Phys. 63, 360 (1988).
10.B. Drevillon and R. Benferhat, J. Appl. Phys. 63, 5088 (1988).
11.R. G. Greenler, J. Chem. Phys. 44, 310 (1966).
12.T. Wadayama, W. Suetaka, and A. Sekiguchi, Jpn. J. Appl. Phys. 27, 501 (1988).
13.N. Maley, I. Szafranck, L. Mandrell, M. Katiyar, J. R. Abelson, and J. A. Thornton, 13th International Conference on Amorphous and Liquid Semiconductors, 22 am B07, Asheville, August 1989.
14.Y. Toyoshima (unpublished).
15.G. Lucovsky and W. B. Pollard, in The Physics of Hydrogenated Amorphous Silicon II, edited by J. D. Joannopoulos and G. Lucovsky (Springer, Berlin, 1984), Chap. 7.
16.The monitor showed a linear increase in film thickness with an incubation time of about 10 min. Since the sensor head was coated with Au, we used evaporated Au as a substrate to prove experimental compatibility and found quite a similar behavior in absorption to the Al substrate case.
17.N. Maley (private communication).
18.A. Hatta, T. Wadayama and W. Suetaka, Anal. Sci. 1, 403 (1985).
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