1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Model describing phosphorus diffusion gettering of transition elements in silicon
Rent:
Rent this article for
USD
10.1063/1.102968
/content/aip/journal/apl/56/22/10.1063/1.102968
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/22/10.1063/1.102968
Loading

Article metrics loading...

/content/aip/journal/apl/56/22/10.1063/1.102968
1990-05-28
2014-04-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Model describing phosphorus diffusion gettering of transition elements in silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/22/10.1063/1.102968
10.1063/1.102968
SEARCH_EXPAND_ITEM