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Patterned tungsten chemical vapor deposition on amorphous silicon by excimer laser modification of the native oxide
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10.1063/1.102931
/content/aip/journal/apl/56/23/10.1063/1.102931
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/23/10.1063/1.102931
/content/aip/journal/apl/56/23/10.1063/1.102931
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/content/aip/journal/apl/56/23/10.1063/1.102931
1990-06-04
2014-09-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Patterned tungsten chemical vapor deposition on amorphous silicon by excimer laser modification of the native oxide
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/23/10.1063/1.102931
10.1063/1.102931
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