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Absence of negative ion effects during on‐axis single target sputter depositions of Y‐Ba‐Cu‐O thin films on Si (100)
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15.The targets were purchased from Superconductive Components of Columbus, Ohio. They were pressed and air fired from powders obtained from a wet chemistry process with initial particle size and postsintering particle size of 3‐4 μm. According to the manufacturer, the material was 99.9% pure and the target density was greater than 90% of the theoretical density. The targets were 3.2 mm thick and 5 cm in diameter. A two‐point dc resistance measurement at room temperature gave a value of 10 Ω regardless of probe position.
16.M. Migliuolo, J. A. Brewer, and R. M. Belan (unpublished).
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