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Formation of amorphous interlayers by a solid‐state diffusion in Zr and Hf thin films on silicon
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10.1063/1.102764
/content/aip/journal/apl/56/5/10.1063/1.102764
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/5/10.1063/1.102764
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/content/aip/journal/apl/56/5/10.1063/1.102764
1990-01-29
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Formation of amorphous interlayers by a solid‐state diffusion in Zr and Hf thin films on silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/5/10.1063/1.102764
10.1063/1.102764
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