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Microfabrication below 10 nm
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10.1063/1.102772
/content/aip/journal/apl/56/5/10.1063/1.102772
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/5/10.1063/1.102772
/content/aip/journal/apl/56/5/10.1063/1.102772
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/content/aip/journal/apl/56/5/10.1063/1.102772
1990-01-29
2014-12-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microfabrication below 10 nm
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/5/10.1063/1.102772
10.1063/1.102772
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