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Enhancement of lateral solid phase epitaxy over SiO2 using a densified and thinned amorphous Si layer
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10.1063/1.103301
/content/aip/journal/apl/56/6/10.1063/1.103301
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/6/10.1063/1.103301
/content/aip/journal/apl/56/6/10.1063/1.103301
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/content/aip/journal/apl/56/6/10.1063/1.103301
1990-02-05
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Enhancement of lateral solid phase epitaxy over SiO2 using a densified and thinned amorphous Si layer
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/6/10.1063/1.103301
10.1063/1.103301
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