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Diagnostics of high‐frequency discharges in CH4/H2 by time‐ and space‐resolved optical emission spectroscopy
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10.1063/1.103320
/content/aip/journal/apl/56/9/10.1063/1.103320
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/9/10.1063/1.103320
/content/aip/journal/apl/56/9/10.1063/1.103320
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/content/aip/journal/apl/56/9/10.1063/1.103320
1990-02-26
2014-08-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Diagnostics of high‐frequency discharges in CH4/H2 by time‐ and space‐resolved optical emission spectroscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/56/9/10.1063/1.103320
10.1063/1.103320
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