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Improvement of the KrF(B→X) excimer lamp with 248 and 193 nm dual wavelength emission using an Ar buffer
1.H. Kumagai and M. Obara, Appl. Phys. Lett. 54, 2619 (1989).
2.H. Kumagai and M. Obara, Jpn. J. Appl. Phys. 28, 2228 (1989).
3.H. Kumagai and M. Obara, Appl. Phys. Lett. 55, 1583 (1989).
4.T. H. Dunning, Jr. and P. J. Hay, J. Chem. Phys. 69, 134 (1978).
5.M. Rokni, J. H. Jacob, and J. A. Mangano, Phys. Rev. A 16, 2216 (1977).
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