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Improvement of the KrF(BX) excimer lamp with 248 and 193 nm dual wavelength emission using an Ar buffer
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10.1063/1.103939
/content/aip/journal/apl/57/20/10.1063/1.103939
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/20/10.1063/1.103939
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/content/aip/journal/apl/57/20/10.1063/1.103939
1990-11-12
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Improvement of the KrF(B→X) excimer lamp with 248 and 193 nm dual wavelength emission using an Ar buffer
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/20/10.1063/1.103939
10.1063/1.103939
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