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X‐pinch soft x‐ray source for microlithography
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10.1063/1.103948
/content/aip/journal/apl/57/20/10.1063/1.103948
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/20/10.1063/1.103948
/content/aip/journal/apl/57/20/10.1063/1.103948
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/content/aip/journal/apl/57/20/10.1063/1.103948
1990-11-12
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: X‐pinch soft x‐ray source for microlithography
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/20/10.1063/1.103948
10.1063/1.103948
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