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Simultaneous measurement of lateral and normal forces with an optical‐beam‐deflection atomic force microscope
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3.In addition, lateral bending of the cantilever, in the x‐y plane, may occur. However, when currently available microfabricated cantilevers are used, no orientational change in the direction of the reflected laser beam is to be expected. Nevertheless, with the proper cantilever design, lateral bending can be detected with the optical beam deflection approach.
4.Silicon Detector Corp., Newbury Park, CA 91320.
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7.The absolute values of the measured forces depend critically on the tip length. Since the exact tip length was not measured after scanning, the values reported here have an estimated uncertainty of a factor of 2.
8.J. B. Pethica and W. C. Oliver, Physica Scripta. T 19, 61 (1987).
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