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High‐energy argon‐ion implantation for waveguide formation in (AlGa)As/GaAs multilayers
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10.1063/1.104115
/content/aip/journal/apl/57/20/10.1063/1.104115
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/20/10.1063/1.104115
/content/aip/journal/apl/57/20/10.1063/1.104115
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/content/aip/journal/apl/57/20/10.1063/1.104115
1990-11-12
2014-09-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High‐energy argon‐ion implantation for waveguide formation in (AlGa)As/GaAs multilayers
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/20/10.1063/1.104115
10.1063/1.104115
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