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Etching characteristics of Si1−x Ge x alloy in ammoniac wet cleaning
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10.1063/1.103912
/content/aip/journal/apl/57/21/10.1063/1.103912
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/21/10.1063/1.103912
/content/aip/journal/apl/57/21/10.1063/1.103912
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/content/aip/journal/apl/57/21/10.1063/1.103912
1990-11-19
2014-09-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Etching characteristics of Si1−xGex alloy in ammoniac wet cleaning
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/21/10.1063/1.103912
10.1063/1.103912
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