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Si‐H and N‐H vibrational properties in glow‐discharge amorphous SiN x :H films (0<x<1.55)
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10.1063/1.104160
/content/aip/journal/apl/57/21/10.1063/1.104160
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/21/10.1063/1.104160
/content/aip/journal/apl/57/21/10.1063/1.104160
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/content/aip/journal/apl/57/21/10.1063/1.104160
1990-11-19
2014-09-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Si‐H and N‐H vibrational properties in glow‐discharge amorphous SiNx:H films (0<x<1.55)
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/21/10.1063/1.104160
10.1063/1.104160
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