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Nanolithography on semiconductor surfaces under an etching solution
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10.1063/1.103711
/content/aip/journal/apl/57/3/10.1063/1.103711
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/3/10.1063/1.103711
/content/aip/journal/apl/57/3/10.1063/1.103711
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/content/aip/journal/apl/57/3/10.1063/1.103711
1990-07-16
2014-08-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nanolithography on semiconductor surfaces under an etching solution
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/3/10.1063/1.103711
10.1063/1.103711
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