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Void formation, electrical activation, and layer intermixing in Si‐implanted GaAs/AlGaAs superlattices
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10.1063/1.103701
/content/aip/journal/apl/57/4/10.1063/1.103701
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/4/10.1063/1.103701
/content/aip/journal/apl/57/4/10.1063/1.103701
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/content/aip/journal/apl/57/4/10.1063/1.103701
1990-07-23
2014-08-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Void formation, electrical activation, and layer intermixing in Si‐implanted GaAs/AlGaAs superlattices
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/4/10.1063/1.103701
10.1063/1.103701
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