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X‐ray photoemission and Raman scattering spectroscopic study of surface modifications of silicon induced by electron cyclotron resonance etching
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10.1063/1.103607
/content/aip/journal/apl/57/6/10.1063/1.103607
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/6/10.1063/1.103607
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/content/aip/journal/apl/57/6/10.1063/1.103607
1990-08-06
2014-07-10
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Scitation|X‐ray photoemission and Raman scattering spectroscopic study of surface modifications of silicon induced by electron cyclotron resonance etching
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/6/10.1063/1.103607
10.1063/1.103607
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