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Effect of F co‐implant during annealing of Be‐implanted GaAs
1.T. Humer‐Hager and P. Zwicknagl, Jpn. J. Appl. Phys. 27, 428 (1988).
2.S. Adachi, Appl. Phys. Lett. 51, 1161 (1987).
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