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Cross‐section transmission electron microscopy study of carbon‐implanted layers in silicon
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10.1063/1.103424
/content/aip/journal/apl/57/8/10.1063/1.103424
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/8/10.1063/1.103424
/content/aip/journal/apl/57/8/10.1063/1.103424
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/content/aip/journal/apl/57/8/10.1063/1.103424
1990-08-20
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Cross‐section transmission electron microscopy study of carbon‐implanted layers in silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/8/10.1063/1.103424
10.1063/1.103424
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