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Silicon implantation into GaAs: Observations of dose rate dependent electrical activation and damage
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10.1063/1.103402
/content/aip/journal/apl/57/9/10.1063/1.103402
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/9/10.1063/1.103402
/content/aip/journal/apl/57/9/10.1063/1.103402
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/content/aip/journal/apl/57/9/10.1063/1.103402
1990-08-27
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Silicon implantation into GaAs: Observations of dose rate dependent electrical activation and damage
http://aip.metastore.ingenta.com/content/aip/journal/apl/57/9/10.1063/1.103402
10.1063/1.103402
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