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Hydrogen effusion from hydrogenated amorphous silicon caused by the deposition of a silicon nitride overlayer
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10.1063/1.104430
/content/aip/journal/apl/58/1/10.1063/1.104430
http://aip.metastore.ingenta.com/content/aip/journal/apl/58/1/10.1063/1.104430
/content/aip/journal/apl/58/1/10.1063/1.104430
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/content/aip/journal/apl/58/1/10.1063/1.104430
1991-01-07
2014-07-14
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Hydrogen effusion from hydrogenated amorphous silicon caused by the deposition of a silicon nitride overlayer
http://aip.metastore.ingenta.com/content/aip/journal/apl/58/1/10.1063/1.104430
10.1063/1.104430
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