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Reduction of boron diffusion in silicon by 1 MeV 29Si+ irradiation
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10.1063/1.104478
/content/aip/journal/apl/58/9/10.1063/1.104478
http://aip.metastore.ingenta.com/content/aip/journal/apl/58/9/10.1063/1.104478
/content/aip/journal/apl/58/9/10.1063/1.104478
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/content/aip/journal/apl/58/9/10.1063/1.104478
1991-03-04
2015-05-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reduction of boron diffusion in silicon by 1 MeV 29Si+ irradiation
http://aip.metastore.ingenta.com/content/aip/journal/apl/58/9/10.1063/1.104478
10.1063/1.104478
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