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Diffusion versus oxidation rates in silicon‐germanium alloys
1.S. Margalit, A. Barlev, A. B. Kuper, H. Aharoni, and A. Neugroschel, J. Cryst. Growth 17, 288 (1972).
2.O. W. Holland, C. White, and D. Fathy, Appl. Phys. Lett. 51, 520 (1987).
3.D. Fathy, O. W. Holland, and C. White, Appl. Phys. Lett. 51, 1337 (1987).
4.G. L. Patton, S. S. Iyer, S. L. Delage, R. C. McIntosh, and E. Gannin, Mater. Res. Soc. Symp. Proc. 102, 295 (1988).
5.F. K. LeGoues, R. Rosenberg, T. Nguyen, F. Himpsel, and B. S. Meyerson, J. Appl. Phys. 65, 1724 (1989).
6.F. K. LeGoues, R. Rosenberg, and B. S. Meyerson, Appl. Phys. Lett. 54, 644 (1989).
7.D. W. Goodman, Y. I. Nissin, E. Rosencher, Heterostructures on Silicon: One Step Further with Silicon (Kluwer, Dordrecht, Boston, London, 1989).
8.S. S. Iyer “Silicon Mol acular Beam Epitaxy,” Silicon Epitaxy, edited by B. J. Balija Academic, New York, 1985), Chap. 2, p. 985.
9.J. Phys. Chem. Ref. Data 14, Suppl. 1, 1676 (1985).
9.collected by M. W. Chase, in Janaf Thermochemical Tables, 3rd ed. (Washington, 1986).
10.J. Räisänen, J. Hirvonen, and A. Antilla, Solid State Electron. 24, 333 (1981). We can get an order of magnitude of the distances that are being compared by noting that, at after 15 min, for Si diffusing in Ge, while the oxide thickness is One needs to be careful when extending those macroscopic data to a phenomenon which happens on a few monolayers scale. Nonetheless, these indicate that oxidation happens much faster than diffusion.
11.G. Vogel, G. Hettich, and H. Mehrer, J. Phys. C 16, 6197 (1983).
12.G. Hettich, H. Mehrer, and K. Maier, in “Defects and Radiations Effects in Semiconductors 1978,” Inst. Phys. Conf. Ser. No. 46, edited by F. Chernov and J. H. Albany (Institute of Physics, London, 1979), p. 500.
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