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B diffusion in Si predamaged with Si+ near the threshold dose of amorphization
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10.1063/1.105492
/content/aip/journal/apl/59/11/10.1063/1.105492
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/11/10.1063/1.105492
/content/aip/journal/apl/59/11/10.1063/1.105492
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/content/aip/journal/apl/59/11/10.1063/1.105492
1991-09-09
2014-09-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: B diffusion in Si predamaged with Si+ near the threshold dose of amorphization
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/11/10.1063/1.105492
10.1063/1.105492
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