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Study of the composition of thin dielectrics grown on Si in a pure N2O ambient
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10.1063/1.105323
/content/aip/journal/apl/59/12/10.1063/1.105323
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/12/10.1063/1.105323
/content/aip/journal/apl/59/12/10.1063/1.105323
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/content/aip/journal/apl/59/12/10.1063/1.105323
1991-09-16
2014-09-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Study of the composition of thin dielectrics grown on Si in a pure N2O ambient
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/12/10.1063/1.105323
10.1063/1.105323
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