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Chemical vapor deposition of copper from 1,5‐cyclooctadiene copper(I) hexafluoroacetylacetonate
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10.1063/1.106060
/content/aip/journal/apl/59/18/10.1063/1.106060
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/18/10.1063/1.106060
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/content/aip/journal/apl/59/18/10.1063/1.106060
1991-10-28
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Chemical vapor deposition of copper from 1,5‐cyclooctadiene copper(I) hexafluoroacetylacetonate
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/18/10.1063/1.106060
10.1063/1.106060
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