Full text loading...
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Study of the changes in the infrared transmission of SiO2 spin‐on‐glass due to ion implantation
1.F. Dupuis, W. G. Oldham, and Y. Shacham-Diamand, IEEE 1985 Symposium on VLSI Technology (IEEE, New York, 1985), p. 52.
2.Y. Shacham-Diamand, N. Moriya, and R. Kalish, MRS Symposium Proceedings: Better Ceramics Through Chemistry IV, edited by B. J. J. Zelinski, C. J. Brinker, D. E. Clark, and D. R. Ulrich (MRS, Pittsburgh, PA, 1990), Vol. 180, p. 703.
3.Y. Shacham-Diamand and I. Nachumovski, J. Electrochem. Soc. 137, 190 (1990).
4.Y. Shacham-Diamand and R. Brenner, J. Electrochem. Soc. 137, 3183 (1990).
5.P. Pai, A. Chettey, R. Roat, N. Cox, and C. Ting, J. Electrochem. Soc. 11, 2830 (1989).
6.R. M. Silverstein, G. C. Bassler, and T. C. Morrill, Spectrometric Identification of Organic Compounds, 4th ed. (Wiley, New York, 1981).
Article metrics loading...