Full text loading...
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Influence of silicon oxide on the morphology of HF‐etched Si(111) surfaces: Thermal versus chemical oxide
1.E. Yablonovitch, D. L. Allara, C. C. Chang, T. Gmitter, and T. B. Bright, Phys. Rev. Lett. 57, 249 (1986);
1.M. Grundner and H. Jacob, Appl. Phys. A 39, 73 (1986).
2.G. S. Higashi, Y. J. Chabal, G. W. Trucks, and K. Raghavachari, Appl. Phys. Lett. 56, 656 (1990).
3.G. S. Higashi, R. S. Becker, Y. J. Chabal, and A. J. Becker, Appl. Phys. Lett. 58, 1656 (1991).
4.P. Jakob and Y. J. Chabal, J. Chem. Phys. 95, 2897 (1991).
5.P. O. Hahn and M. Henzler, J. Appl. Phys. 52, 4122 (1981);
5.P. O. Hahn and M. Henzler, J. Vac. Sci. Technol. A 2, 574 (1984);
5.J. M. Gibson, M. Y. Lanzerotti, and V. Elser, Appl. Phys. Lett. 55, 1394 (1989);
5.A. Ogura, J. Electrochem. Soc. 138, 807 (1991).
6.Y. J. Chabal, Surf. Sci. 8, 211 (1988).
7.Y. J. Chabal, G. S. Higashi, K. Raghavachari, and V. A. Burrows, J. Vac. Sci. Technol. A 7, 2104 (1989).
8.P. Dumas, Y. J. Chabal, and G. S. Higashi, Phys. Rev. Lett. 65, 1124 (1990).
9.P. Dumas and Y. J. Chabal, Chem. Phys. Lett. 181, 537 (1991).
10.Note that the absorbance spectra given in Fig. 1 of Ref. 8 are also given as and not in terms of the natural log, as implied in the caption of that figure.
11.P. Jakob, Y. J. Chabal, and K. Raghavachari, Chem. Phys. Lett. 187, 189 (1991).
12.P. Guyot-Sionnest, P. Dumas, Y. J. Chabal, and G. S. Higashi, Phys. Rev. Lett. 64, 2156 (1990);
12.P. Guyot-Sionnest, P. Dumas, and Y. J. Chabal, J. Electron Spectrosc. Relat. Phenom. 54/55, 27 (1990).
13.Triangular pits of various sizes have been observed in STM images by H. E. Hessel, A. Feltz, M. Reiter, U. Memmert, and R. J. Behm, (private communication) and by R. S. Becker (private communication).
14.Recent STM images of samples taken from the same wafers as in this study show that the average terrace size is closer to 500 Å (private communication by R. S. Becker), indicating that the IR analysis, assuming the presence of perfect domains of finite size, underestimates the domain size, probably because of the presence of point defects (see Ref. 11).
Article metrics loading...