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New insights on the effect of hydrogen to tungsten hexafluoride partial pressure ratio on plasma deposited tungsten thin films
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10.1063/1.105763
/content/aip/journal/apl/59/24/10.1063/1.105763
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/24/10.1063/1.105763
/content/aip/journal/apl/59/24/10.1063/1.105763
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/content/aip/journal/apl/59/24/10.1063/1.105763
1991-12-09
2014-10-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: New insights on the effect of hydrogen to tungsten hexafluoride partial pressure ratio on plasma deposited tungsten thin films
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/24/10.1063/1.105763
10.1063/1.105763
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