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Comparative study of the properties of ultrathin Si3N4 films with Auger electron spectroscopy, spectroscopic ellipsometry, and Raman spectroscopy
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10.1063/1.105621
/content/aip/journal/apl/59/3/10.1063/1.105621
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/3/10.1063/1.105621
/content/aip/journal/apl/59/3/10.1063/1.105621
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/content/aip/journal/apl/59/3/10.1063/1.105621
1991-07-15
2014-07-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Comparative study of the properties of ultrathin Si3N4 films with Auger electron spectroscopy, spectroscopic ellipsometry, and Raman spectroscopy
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/3/10.1063/1.105621
10.1063/1.105621
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