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Theoretical study of a vacuum ultraviolet F2 excimer lamp (157 nm) excited by microwave discharge
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10.1063/1.105467
/content/aip/journal/apl/59/4/10.1063/1.105467
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/4/10.1063/1.105467
/content/aip/journal/apl/59/4/10.1063/1.105467
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/content/aip/journal/apl/59/4/10.1063/1.105467
1991-07-22
2014-09-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Theoretical study of a vacuum ultraviolet F2 excimer lamp (157 nm) excited by microwave discharge
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/4/10.1063/1.105467
10.1063/1.105467
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