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Monte Carlo‐fluid hybrid model of the accumulation of dust particles at sheath edges in radio‐frequency discharges
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10.1063/1.105409
/content/aip/journal/apl/59/6/10.1063/1.105409
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/6/10.1063/1.105409
/content/aip/journal/apl/59/6/10.1063/1.105409
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/content/aip/journal/apl/59/6/10.1063/1.105409
1991-08-05
2014-08-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Monte Carlo‐fluid hybrid model of the accumulation of dust particles at sheath edges in radio‐frequency discharges
http://aip.metastore.ingenta.com/content/aip/journal/apl/59/6/10.1063/1.105409
10.1063/1.105409
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