Full text loading...
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Mechanisms of copper chemical vapor deposition
1.N. Awaya and Y. Arita, 1989 Symposium on VLSI Technology (The IEEE Electron Devices Society, Kyoto, Japan, 1989), p. 103.
2.J. A. T. Norman, B. A. Muratore, P. N. Dyer, D. A. Roberts, and A. K. Hochberg, IEEE VLSI Multilevel Interconnection Conference (The IEEE Electron Devices Society, Santa Clara, CA, 1991), p. 123.
3.Y. Arita, N. Awaya, K. Ohno, and M. Sato, Tech. Dig. IEDM, 39 (1990).
4.A. E. Kaloyeros, A. Feng, J. Garhart, K. C. Brooks, S. K. Ghosh, A. N. Saxena, and F. Luehrs, J. Electron. Mater. 19, 271 (1990).
5.N. Awaya and Y. Arita, 1991 Symposium on VLSI Technology (The IEEE Electron Devices Society, Oiso, Japan, 1991), p. 37.
6.H.-K. Shin, M. J. Hampden-Smith, T. Kodas, and E. N. Duesler, presented at the Fall MRS meeting, Boston, MA, 1990, abstract No. E4.9 (unpublished).
7.T. Baum, C. E. Larson, S. K. Reynolds, C. J. Smart, and E. F. Baran, presented at the August 1991 American Chemical Society Meeting, New York, NY (unpublished).
8.S. K. Reynolds, C. J. Smart, E. F. Baran, T. H. Baum, C. E. Larson, and P. J. Brock, Appl. Phys. Lett. 59, 2332 (1991).
9.H.-K. Shin, K. M. Chi, M. J. Hampden-Smith, and T. T. Kodas, presented at the August 1991 American Chemical Society Meeting, New York, NY (unpublished).
10.R. Kumar, A. W. Maverick, F. R. Fronczek, G. Lai, and G. L. Griffin, presented at the Spring ACS Meeting, Atlanta, GA, 1991, abstract No. 256 (unpublished).
11.M. Liehr, J. Vac. Sci. Technol. A 8, 1939 (1990).
12.F. Doyle, K. A. Eriksen, and D. Van Engen, Organometallics 4, 830 (1985).
13.R. L. Van Hemert, L. B. Spendlove, and R. E. Sievers, J. Electrochem. Soc. 112, 1124 (1965).
14.C. D. Wagner, L. E. Davis, M. V. Zeller, J. A. Taylor, R. H. Raymond, and L. H. Gale, Surf. Interface Anal. 3, 211 (1981).
15.The absolute concentration can vary by 30% depending upon the choice of cross section and transmission function, however, the measured intensity difference between the surfaces is accurate within 10%.
16.H. Ogoshi and K. Nakamoto, J. Chem. Phys. 45, 3113 (1966).
17.K.-M. Chi and M. J. Hampden-Smith (unpublished).
18.J. P. Tobin, W. Hirshwald, and J. Cunningham, Appl. Surf. Sci. 16, 441 (1983).
19.No evidence for Cu(II) was found even after adsorption and no effects due to x-ray-induced reduction were observed.
20.D. A. Shirley, Photoemission in Solids I (Springer, Berlin, 1978), pp. 165–196.
21.G. Moretti and P. Porta, Surf. Interface Anal. 15, 47 (1990).
22.F. A. Cotton and G. Wilkinson, Basic Inorganic Chemistry (Wiley, New York, 1976).
23.G. S. Girolami and L. H. Dubois, presented at the August 1991 American Chemical Society Meeting, New York, NY (unpublished).
24.A. Kaloyeros (unpublished).
Article metrics loading...