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Localized fabrication of Si nanostructures by focused ion beam implantation
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10.1063/1.107179
/content/aip/journal/apl/60/15/10.1063/1.107179
http://aip.metastore.ingenta.com/content/aip/journal/apl/60/15/10.1063/1.107179
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/content/aip/journal/apl/60/15/10.1063/1.107179
1992-04-13
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Localized fabrication of Si nanostructures by focused ion beam implantation
http://aip.metastore.ingenta.com/content/aip/journal/apl/60/15/10.1063/1.107179
10.1063/1.107179
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