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Aluminum oxide thin films prepared by chemical vapor deposition from aluminum acetylacetonate
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10.1063/1.106699
/content/aip/journal/apl/60/3/10.1063/1.106699
http://aip.metastore.ingenta.com/content/aip/journal/apl/60/3/10.1063/1.106699
/content/aip/journal/apl/60/3/10.1063/1.106699
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/content/aip/journal/apl/60/3/10.1063/1.106699
1992-01-20
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Aluminum oxide thin films prepared by chemical vapor deposition from aluminum acetylacetonate
http://aip.metastore.ingenta.com/content/aip/journal/apl/60/3/10.1063/1.106699
10.1063/1.106699
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