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Relative fluorine concentrations in radio frequency/electron cyclotron resonance hybrid glow discharges
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10.1063/1.107428
/content/aip/journal/apl/60/7/10.1063/1.107428
http://aip.metastore.ingenta.com/content/aip/journal/apl/60/7/10.1063/1.107428
/content/aip/journal/apl/60/7/10.1063/1.107428
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/content/aip/journal/apl/60/7/10.1063/1.107428
1992-02-17
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Relative fluorine concentrations in radio frequency/electron cyclotron resonance hybrid glow discharges
http://aip.metastore.ingenta.com/content/aip/journal/apl/60/7/10.1063/1.107428
10.1063/1.107428
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