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Kinetics of particle generation in sputtering and reactive ion etching plasmas
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10.1063/1.106448
/content/aip/journal/apl/60/9/10.1063/1.106448
http://aip.metastore.ingenta.com/content/aip/journal/apl/60/9/10.1063/1.106448
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/content/aip/journal/apl/60/9/10.1063/1.106448
1992-03-02
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Kinetics of particle generation in sputtering and reactive ion etching plasmas
http://aip.metastore.ingenta.com/content/aip/journal/apl/60/9/10.1063/1.106448
10.1063/1.106448
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