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Generation of ultralong pulse ArF emission in dynamic mixtures of He plasma jet with Ar/F2 neutral gas
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10.1063/1.107543
/content/aip/journal/apl/61/12/10.1063/1.107543
http://aip.metastore.ingenta.com/content/aip/journal/apl/61/12/10.1063/1.107543
/content/aip/journal/apl/61/12/10.1063/1.107543
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/content/aip/journal/apl/61/12/10.1063/1.107543
1992-09-21
2014-07-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Generation of ultralong pulse ArF emission in dynamic mixtures of He plasma jet with Ar/F2 neutral gas
http://aip.metastore.ingenta.com/content/aip/journal/apl/61/12/10.1063/1.107543
10.1063/1.107543
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