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Nitrogen and oxygen incorporation during rapid thermal processing of Si in N2O
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10.1063/1.107706
/content/aip/journal/apl/61/9/10.1063/1.107706
http://aip.metastore.ingenta.com/content/aip/journal/apl/61/9/10.1063/1.107706
/content/aip/journal/apl/61/9/10.1063/1.107706
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/content/aip/journal/apl/61/9/10.1063/1.107706
1992-08-31
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nitrogen and oxygen incorporation during rapid thermal processing of Si in N2O
http://aip.metastore.ingenta.com/content/aip/journal/apl/61/9/10.1063/1.107706
10.1063/1.107706
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