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Laser‐driven boron diffusion into a Si epitaxial layer from a p + boron‐doped Si substrate
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10.1063/1.107718
/content/aip/journal/apl/61/9/10.1063/1.107718
http://aip.metastore.ingenta.com/content/aip/journal/apl/61/9/10.1063/1.107718
/content/aip/journal/apl/61/9/10.1063/1.107718
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/content/aip/journal/apl/61/9/10.1063/1.107718
1992-08-31
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Laser‐driven boron diffusion into a Si epitaxial layer from a p+ boron‐doped Si substrate
http://aip.metastore.ingenta.com/content/aip/journal/apl/61/9/10.1063/1.107718
10.1063/1.107718
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