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Thermally stable oxygen implant isolation of p‐type Al0.2Ga0.8As
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10.1063/1.109288
/content/aip/journal/apl/62/20/10.1063/1.109288
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/20/10.1063/1.109288
/content/aip/journal/apl/62/20/10.1063/1.109288
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/content/aip/journal/apl/62/20/10.1063/1.109288
1993-05-17
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thermally stable oxygen implant isolation of p‐type Al0.2Ga0.8As
http://aip.metastore.ingenta.com/content/aip/journal/apl/62/20/10.1063/1.109288
10.1063/1.109288
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